Microfabrication

Microfabrication & cleanroom

Photolithography, thin films, etching, micromachining and MEMS.

• Gerber and Excellon file inspectorCheck a Gerber RS-274X or Excellon file in your browser: format, units, extents and primitives, with no upload.→
• Micromachining parameters: milling and drillingMaterial and tool geometry are enough: a sourced starting point appears immediately, without ever asking for the cutter’s reference.→
• SU-8 process recipe (spin-coating, soft bake, dose, PEB, development)Spin-coating speed, soft bake, substrate-corrected dose, exposure time, PEB and development, by SU-8 product, every value sourced with measured uncertainty.→