UV dose and irradiance converter
mJ/cm², J/m², mW/cm² and W/m², the units of radiometers and photolithography datasheets.
Result
Converted value
10 J/m²
- Formula
- 1 mJ/cm² = 10 J/m²
Calculation, assumptions and sources
OverviewConversion of an areal UV dose or an irradiance.
Conversion of an areal UV dose or an irradiance. Photolithography datasheets quote dose in mJ/cm², radiometers quote irradiance in mW/cm².
Method & formulasD = E × t
D = E × tt = D / E1 mJ/cm² = 10 J/m² (exactly)
For a resist at 150 mJ/cm² under a 10 mW/cm² lamp, exposure lasts 15 s. The uncertainty lies in the irradiance measurement.
- mJ/cm²
- Millijoule per square centimeter (mJ/cm²)
- J/cm²
- Joule per square centimeter (J/cm²)
- J/m²
- Joule per square meter (J/m²)
- kJ/m²
- Kilojoule per square meter (kJ/m²)
- mW·s/cm²
- Milliwatt-second per square centimeter (mW·s/cm²)
- µW/cm²
- Microwatt per square centimeter (µW/cm²)
- mW/cm²
- Milliwatt per square centimeter (mW/cm²)
- W/cm²
- Watt per square centimeter (W/cm²)
- W/m²
- Watt per square meter (W/m²)
- kW/m²
- Kilowatt per square meter (kW/m²)
Validity domainA dose refers to the spectral band in which it was measured.
A dose refers to the spectral band in which it was measured. Negative epoxy resist datasheets recommend measuring at i-line (365 nm). A broadband radiometer, also sensitive below 350 nm, reads higher for the same useful exposure.