UV dose and irradiance converter
D = E × t
Convert an areal dose (mJ/cm², J/cm², J/m², kJ/m²) or an irradiance (µW/cm², mW/cm², W/cm², W/m², kW/m²). These are the two quantities of all photolithography and UV curing: datasheets quote dose in mJ/cm², radiometers quote irradiance in mW/cm².
1 Millijoule per square centimeter (mJ/cm²) = 10 Joule per square meter (J/m²)
Raw value: 10
Scientific dossier
What the tool computes, what it assumes, where it stops being valid, and where its data comes from.
Method & formulasD = E × t
D = E × t
t = D / E
1 mJ/cm² = 10 J/m² (exactly)
Dose D is the product of irradiance E and exposure time t. A resist requiring 150 mJ/cm² under a lamp measured at 10 mW/cm² therefore needs 15 seconds. This arithmetic is exact: it is the irradiance measurement that carries the uncertainty.
- mJ/cm²
- · Millijoule per square centimeter (mJ/cm²)
- J/cm²
- · Joule per square centimeter (J/cm²)
- J/m²
- · Joule per square meter (J/m²)
- kJ/m²
- · Kilojoule per square meter (kJ/m²)
- mW·s/cm²
- · Milliwatt-second per square centimeter (mW·s/cm²)
- µW/cm²
- · Microwatt per square centimeter (µW/cm²)
- mW/cm²
- · Milliwatt per square centimeter (mW/cm²)
- W/cm²
- · Watt per square centimeter (W/cm²)
- W/m²
- · Watt per square meter (W/m²)
- kW/m²
- · Kilowatt per square meter (kW/m²)
Validity domainA dose in mJ/cm² is meaningful only together with the spectral band in which it was measured.
A dose in mJ/cm² is meaningful only together with the spectral band in which it was measured. Negative epoxy resist datasheets recommend measuring at i-line (365 nm): a broadband radiometer, also sensitive below 350 nm, will read higher for the same useful exposure. Converting a dose between units is exact; comparing two doses measured with different probes is not.